SiO₂/ITO Transparent Contacts with Anti-Soiling Coatings for Bifacial Perovskite Solar Cells in Harsh Environments

Indium Tin Oxide (ITO) thin films are transparent conductive materials essential for the fabrication of semi-transparent perovskite solar cells. The silica coating is exceptionally anti-reflective, reducing sunlight reflection and anti-dust coating. This study examines the regulated modification of optical and morphological characteristics of silica thin films generated via RF magnetron sputtering. ITO films require elevated temperature processes (> 200°C) to enhance crystallinity, optical transparency, and electrical conductivity. Their thermal sensitivity restricts their application on heat-sensitive substrates. This study demonstrates that dust accumulation on silica coatings is negatively correlated with oxygen content, hence validating their self-cleaning properties. High-quality ITO layers at diminished processing temperatures are crucial for the efficiency and scalability of ST-PSCs. This study presents a room-temperature sputtering deposition of a SiO ₂ /ITO layered structure enabling transparent ST-PSC connections. Films with optimal surface morphology and thickness attain 90% visual transmittance (400–1000 nm) and sheet resistance ≤ 45.0 Ω/sq. Industrial-scale ITO coatings on 4-inch silicon substrates at ambient temperature mitigate the limitations of high-temperature methods. Films produced under low pressure (2 mTorr) and RF power (100 W) exhibited superior electrical and topological characteristics, with AFM verifying surface roughness of less than 1 nm. Hall effect measurements, X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, and atomic force microscopy validated the films' compact, homogenous, and defect-free structure. These advancements facilitate the regulated manufacture of transparent conductive oxide layers on temperature-sensitive substrates, enabling flexible and efficient optoelectronic devices.