Design and simulation of a MEMS single proof mass capacitive accelerometer with integral parallel-plate capacitors
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This work presents an accelerometer that uses capacitive sensing mechanisms. In the proposed structure, the accelerations are sensed by differential capacitances. This structure has a size of 500um×450um×6um with a measurement range of ± 50g. Simulated results showed that the sensitivities of the accelerometer are 3.04mV/g, and 0.034 mV/g for the Y-axis and Z-axis, respectively. Moreover, the cross-axis sensitivities of the structure are less than 1%. Brownian noises in each direction are 0.9 µg/√Hz for the y-axis, and 1.5 µg/√Hz for the z-axis. In this study, we employed the finite element software as a simulation tool to analyze the characteristics of accelerometer .
