Reactive Sputtering of Metal Oxide Films: Process Optimization, Structural Characteristics, and Functional Applications

This study reconstructs and extends foundational experimental work on reactive sputtering of metal oxide films, producing transparent conducting layers of cadmium oxide (CdO), tin oxide (SnO₂), indium oxide (In₂O₃), iron oxides, and composite gold on bismuth oxide. We recontextualize legacy methods within modern frameworks, providing optimized approaches for material selection, process control, and structural improvements. The findings are validated by contemporary literature, supporting the adoption of these materials in transparent electrodes and optoelectronic applications. Electrical, optical, and morphological characteristics are discussed, with data trends aligned to current industry needs.