Design and analysis of curved electrode configurations for enhanced sensitivity in 1-axis MEMS accelerometers

  1. Adhinarayan Naembin Ashok
  2. Adarsh Ganesan
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  1. Version published to 10.1007/s00542-025-05979-x
  2. Version published to 10.21203/rs.3.rs-7057947/v1 on Research Square