Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive micro-device for multifunctional sensing applications

  1. Hanin Amara
  2. Nadeem Tariq Beigh
  3. Nouha Alcheikh
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  1. Version published to 10.1038/s41378-025-01041-y
  2. Version published to 10.21203/rs.3.rs-6319987/v1 on Research Square