Si3N4 composite ceramic preparation with kerf loss silicon powder from photovoltaic industry by molten salt assisted nitriding method

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Abstract

In this paper, Si 3 N 4 composite ceramic were synthesized with kerf loss silicon waste powder as the raw material by molten salt assisted nitridation method. Na 3 AlF 6 molten salt was introduced into the system and the effects of Si-salt ratio, nitridation temperature on the nitriding product were investigated. These results indicated that the addition of Na 3 AlF 6 promotes the conversion of waste silicon to Si 2 N 2 O, and 90.7% of Si 2 N 2 O phase was obtained with the Si-salt ratio of 1:1.5 at 1350℃. The increase in temperature causes the main phase of the product changes from Si 2 N 2 O to β-Si 3 N 4 , which is due to the decomposition of Si 2 N 2 O and the α→β phase transition of Si 3 N 4 . And the content of β-Si 3 N 4 phase reached 72.9% with the Si-salt ratio of 1:0.75 at 1450℃. The formation mechanism was analyzed combined with the in-situ nitriding process.

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