Photoacoustic Gas Sensing Using a Novel Fluidic Microphone Based on Thermal MEMS

Photoacoustic spectroscopy (PAS) is a powerful technique for selective gas detection; however, its performance in non-resonant configurations is fundamentally constrained by the poor low-frequency response of conventional acoustic detectors. Commercial MEMS microphones, although compact and cost effective, exhibit limited infrasound sensitivity, which restricts the development of truly miniaturised and broadband PAS systems. To address this limitation, we present a novel MEMS fluidic microphone (f-mic) that operates on a thermal sensing principle and is explicitly optimised for the infrasound regime. The sensor demonstrates a constant sensitivity of 32 μV/Pa for frequencies below 20 Hz. A detailed analytical model incorporating frequency-dependent effects is developed to identify and investigate the critical design parameters that influence system performance. The overall system exhibits a band-pass frequency response, enabling broadband operation. Based on these insights, a miniaturised photoacoustic cell is fabricated, ensuring efficient optical coupling and f-mic integration. Experimental validation using a CO2-targeted laser system demonstrates a linear response up to 5000 ppm, a sensitivity of 6 nV/ppm, and a theoretical detection limit of 300 ppb over 100 s, resulting in an NNEA of 6×10−6 W cm−1 Hz−0.5. These results establish the f-mic as a robust, scalable solution for non-resonant PAS, effectively overcoming a significant bottleneck in compact gas sensing technologies.