M-Lines Spectroscopy for Thin Films: A New Perspective

The m-lines spectroscopy is a precise, non-destructive and contactless method, and one of its main applications is the determination of the geometric-optical parameters of a thin film deposited over a substrate, namely the refractive index and the thickness of the film under analysis. The method was first described in 1969 with the seminal work of Tien, more than half a century ago, and, since then, it has been reported in the literature that at least two modal indices of the same polarization are required to unequivocally determine a given film’s refractive index and thickness. This constraint imposes a limit on the waveguide’s thickness, for it leaves out the possibility of determining the geometric-optical parameters of all films where only single-mode propagation is feasible. In this work, we propose and validate a strategy that extends the applicability of the method to single-mode operation, enlarging its operational thickness detection range. Moreover, the results obtained demonstrate that restricting the parameter extraction to fundamental modes leads to a measurable increase in precision. This improvement is attributed to the lower susceptibility to experimental uncertainties, lower sensitivity to surface roughness and nearby structures, and higher confinement that characterize fundamental modes as opposed to higher-order ones.