Terahertz CMOS High-Sensitivity Sensor Based on Hybridized Spoof Surface Plasmon Resonator

In recent years, spoof localized surface plasmon (SLSP) have gained increasing attention due to their strong electromagnetic wave confinements. Based on the multipole resonance of SLSP, a high-Q-factor terahertz resonator based on CMOS technology is proposed. Specifically, a quadrilateral hybridized SLSP structure, composed of a core and a cavity SLSP resonator, is designed to reduce electric dimension and improve the Q-factor. The experimentally measured Q-factor reached 56.7 at 194 GHz, which is quite a high value within the terahertz frequency band, particularly given the compact electrical dimension of 0.081λ × 0.081λ. Moreover, pharmaceutical testing in the terahertz frequency range was successfully conducted, including glucose and two traditional Chinese medicines: Chuanbei and Sanqi. And three frequency shifts (4 GHz, 3.2 GHz, and 1.4 GHz) were observed. Thus, the SLSP resonator holds great potential for high-performance terahertz applications.