Terahertz CMOS High Sensitivity Sensor based on Hybridized Spoof Surface Plasmons Resonator

In recent years, spoof localized surface plasmons (SLSPs) have gained increasing attention due to their strong electromagnetic wave confinements. Based on the multipole resonance of the SLSPs, a high-Q-factor terahertz resonator based on CMOS technology is proposed. Specifically, a quad-rilateral hybridized SLSPs structure composed of a core and a cavity SLSPs resonator, is designed to reduce electric dimension and improve the Q-factor. The experimentally measured Q-factor reaches 56.7 at 194 GHz, which is a quite high value within the terahertz frequency band, partic-ularly given the compact electrical dimension of 0.081λ0.081λ. Moreover, the pharmaceutical testing in the terahertz frequency range have been successfully conducted, including glucose and two traditional Chinese medicine: Chuan bei and Sanqi. And three frequency shifts(4GHz, 3.2GHz, 1.4GHz) are observed. Thus, the SLSPs resonator holds great potential for high-performance te-rahertz applications.