SENIS Advanced Sensors and Instruments for Magnetic Field and Electric Current Measurements
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This paper presents the latest innovations and applications of SENIS’s 3D Hall sensors, which are based on proprietary vertical and horizontal Hall sensor technology, as well as low-noise teslameters, cryogenic low-noise magnetic field transducers, 3D magnetic field mappers, and 3D cameras. Novel Hall-based current sensors, offering high resolution and bandwidth, will also be introduced, with applications in detectors for monitoring boards. SENIS sensors and measurement instruments, known for their high resolution, accuracy, and compact design, are critical tools for the fiducialization and alignment of magnets, as well as for monitoring, quality control, inline inspection, and metrology. A key factor in achieving precise measurements is the small field sensitive volume of the sensor and the orthogonality of the Hall elements. SENIS’s proprietary calibration methodology reduces the orthogonality error of the 3-axis sensor to as low as 0.1°, ensuring high precision and reliability in various scientific and industrial applications. Additionally, this paper briefly introduces SENIS’s 3D Teslameter 3MH6-E, which offers a resolution of 0.5 µT and an accuracy of 100 ppm, combined with the field-sensitive volume of the 3-axis sensor measuring 100 µm × 100 µm × 10 µm. Thanks to its ability to measure both the orientation and amplitude of the magnetic flux density vector, it serves as a reference device in metrology, replacing NMR teslameters.