A MEMS wall shear stress sensor with floating cover plate for aerospace flow monitoring in harsh environments

  1. Yunzhe Liu
  2. Chuqiao Wang
  3. Guanghui Ding
  4. Xingxu Zhang
  5. Jinjun Deng
  6. Yang He
  7. Binghe Ma
  8. Weizheng Yuan
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  1. Version published to 10.1038/s41378-025-01050-x
  2. Version published to 10.21203/rs.3.rs-6704917/v1 on Research Square