A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links

  1. Wenli Xue
  2. Yichen Liu
  3. Xingwang Zhu
  4. Mingkun Wang
  5. Zhichao Weng
  6. Yongquan Su
  7. Yi Yang
  8. Hongfeng Zhao
  9. Yang Wang
  10. Hao Chen
  11. Lihao Wang
  12. Zhenyu Wu
Read the full article See related articles

Listed in

This article is not in any list yet, why not save it to one of your lists.
Log in to save this article

Abstract

No abstract available

Article activity feed

  1. Version published to 10.1038/s41378-025-00935-1
  2. Version published to 10.21203/rs.3.rs-5616577/v1 on Research Square